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  4. Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

av Seongbo Shim, Youngsoo Shin

del av NanoScience and Technology-serien

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography av Seongbo Shim
Om Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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  • Språk:
  • Engelska
  • ISBN:
  • 9783030094553
  • Format:
  • Häftad
  • Sidor:
  • 138
  • Utgiven:
  • 8. februari 2019
  • Utgåva:
  • 12018
  • Mått:
  • 155x235x0 mm.
  • Vikt:
  • 454 g.
  Fri leverans
Leveranstid: 2-4 veckor
Förväntad leverans: 19. december 2024
Förlängd ångerrätt till 31. januari 2025

Om Seongbo Shim

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Beskrivning av Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification.

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